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Products

Stepper

Profile information:
basic information
Categories:
Stepper
Release time:
2019-03-20
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Details

Resolution:0.35um um L&S (At best Focus)

Overlay Accuracy LSA-EGA:|X|  + 3σ≤0.07um

Lens Distortion:≤45nm(x,y)

Maximum Exposure Area:22mm x 22mm  

Stepping Precision:3σ≤0.05um

Parameters
Characteristics